diff --git a/src/webgpu/format_info.ts b/src/webgpu/format_info.ts
index 8c1e9b7d7d0..d582a2005b4 100644
--- a/src/webgpu/format_info.ts
+++ b/src/webgpu/format_info.ts
@@ -1856,7 +1856,20 @@ export function isSintOrUintFormat(format: GPUTextureFormat) {
 /**
  * Returns true of format can be multisampled.
  */
-export function isMultisampledTextureFormat(format: GPUTextureFormat): boolean {
+export const kCompatModeUnsupportedMultisampledTextureFormats: readonly GPUTextureFormat[] = [
+  'rgba16float',
+  'r32float',
+] as const;
+
+export function isMultisampledTextureFormat(
+  format: GPUTextureFormat,
+  isCompatibilityMode: boolean
+): boolean {
+  if (isCompatibilityMode) {
+    if (kCompatModeUnsupportedMultisampledTextureFormats.indexOf(format) >= 0) {
+      return false;
+    }
+  }
   return kAllTextureFormatInfo[format].multisample;
 }
 
diff --git a/src/webgpu/gpu_test.ts b/src/webgpu/gpu_test.ts
index 149d57f85ba..45d6d407082 100644
--- a/src/webgpu/gpu_test.ts
+++ b/src/webgpu/gpu_test.ts
@@ -290,21 +290,10 @@ export class GPUTestSubcaseBatchState extends SubcaseBatchState {
   }
 
   skipIfMultisampleNotSupportedForFormat(...formats: (GPUTextureFormat | undefined)[]) {
-    if (this.isCompatibility) {
-      for (const format of formats) {
-        if (format === undefined) continue;
-        if (format === 'rgba16float' || is32Float(format)) {
-          this.skip(
-            `texture format '${format} is not guaranteed to be multisampled support in compat mode`
-          );
-        }
-      }
-    }
-
     for (const format of formats) {
       if (format === undefined) continue;
-      if (!isMultisampledTextureFormat(format)) {
-        this.skip(`texture format '${format} is not supported to be multisampled`);
+      if (!isMultisampledTextureFormat(format, this.isCompatibility)) {
+        this.skip(`texture format '${format}' is not supported to be multisampled`);
       }
     }
   }
@@ -585,21 +574,10 @@ export class GPUTestBase extends Fixture<GPUTestSubcaseBatchState> {
   }
 
   skipIfMultisampleNotSupportedForFormat(...formats: (GPUTextureFormat | undefined)[]) {
-    if (this.isCompatibility) {
-      for (const format of formats) {
-        if (format === undefined) continue;
-        if (format === 'rgba16float' || is32Float(format)) {
-          this.skip(
-            `texture format '${format} is not guaranteed to be multisampled support in compat mode`
-          );
-        }
-      }
-    }
-
     for (const format of formats) {
       if (format === undefined) continue;
-      if (!isMultisampledTextureFormat(format)) {
-        this.skip(`texture format '${format} is not supported to be multisampled`);
+      if (!isMultisampledTextureFormat(format, this.isCompatibility)) {
+        this.skip(`texture format '${format}' is not supported to be multisampled`);
       }
     }
   }
diff --git a/src/webgpu/shader/execution/expression/call/builtin/textureDimensions.spec.ts b/src/webgpu/shader/execution/expression/call/builtin/textureDimensions.spec.ts
index cebf3a4dafb..c28c8a94f36 100644
--- a/src/webgpu/shader/execution/expression/call/builtin/textureDimensions.spec.ts
+++ b/src/webgpu/shader/execution/expression/call/builtin/textureDimensions.spec.ts
@@ -300,6 +300,11 @@ Parameters:
   .beforeAllSubcases(t => {
     const info = kTextureFormatInfo[t.params.format];
     t.skipIfTextureFormatNotSupported(t.params.format);
+    if (t.params.samples > 1) {
+      // multisampled texture requires GPUTextureUsage.RENDER_ATTACHMENT usage
+      t.skipIfMultisampleNotSupportedForFormat(t.params.format);
+      t.selectDeviceForRenderableColorFormatOrSkipTestCase(t.params.format);
+    }
     t.selectDeviceOrSkipTestCase(info.feature);
   })
   .fn(t => {
diff --git a/src/webgpu/shader/execution/expression/call/builtin/textureLoad.spec.ts b/src/webgpu/shader/execution/expression/call/builtin/textureLoad.spec.ts
index abbd55a41c2..3d02a52e34f 100644
--- a/src/webgpu/shader/execution/expression/call/builtin/textureLoad.spec.ts
+++ b/src/webgpu/shader/execution/expression/call/builtin/textureLoad.spec.ts
@@ -19,7 +19,6 @@ If an out of bounds access occurs, the built-in function returns one of:
 
 import { makeTestGroup } from '../../../../../../common/framework/test_group.js';
 import {
-  canUseAsRenderTarget,
   isCompressedFloatTextureFormat,
   isDepthTextureFormat,
   isMultisampledTextureFormat,
@@ -360,7 +359,7 @@ Parameters:
         'texture_depth_multisampled_2d',
       ] as const)
       .combine('format', kAllTextureFormats)
-      .filter(t => isMultisampledTextureFormat(t.format))
+      .filter(t => isMultisampledTextureFormat(t.format, false))
       .filter(t => !isStencilTextureFormat(t.format))
       // Filter out texture_depth_multisampled_2d with non-depth formats
       .filter(
@@ -373,10 +372,11 @@ Parameters:
       .combine('S', ['i32', 'u32'] as const)
   )
   .beforeAllSubcases(t => {
-    const { format } = t.params;
+    const { format, texture_type } = t.params;
     t.skipIfTextureFormatNotSupported(format);
-    t.skipIfTextureLoadNotSupportedForTextureType(t.params.texture_type);
-    t.selectDeviceForTextureFormatOrSkipTestCase(t.params.format);
+    t.skipIfTextureLoadNotSupportedForTextureType(texture_type);
+    t.skipIfMultisampleNotSupportedForFormat(format);
+    t.selectDeviceForTextureFormatOrSkipTestCase(format);
   })
   .fn(async t => {
     const { texture_type, format, stage, samplePoints, C, S } = t.params;
@@ -385,10 +385,7 @@ Parameters:
     const descriptor: GPUTextureDescriptor = {
       format,
       size: [8, 8],
-      usage:
-        GPUTextureUsage.COPY_DST |
-        GPUTextureUsage.TEXTURE_BINDING |
-        GPUTextureUsage.RENDER_ATTACHMENT,
+      usage: GPUTextureUsage.COPY_DST | GPUTextureUsage.TEXTURE_BINDING,
       sampleCount,
     };
     const { texels, texture } = await createTextureWithRandomDataAndGetTexels(t, descriptor);
@@ -627,10 +624,10 @@ Parameters:
       ] as const)
   )
   .beforeAllSubcases(t => {
-    const { format } = t.params;
+    const { format, texture_type } = t.params;
     t.skipIfTextureFormatNotSupported(format);
-    t.skipIfTextureLoadNotSupportedForTextureType(t.params.texture_type);
-    t.selectDeviceForTextureFormatOrSkipTestCase(t.params.format);
+    t.skipIfTextureLoadNotSupportedForTextureType(texture_type);
+    t.selectDeviceForTextureFormatOrSkipTestCase(format);
   })
   .fn(async t => {
     const { texture_type, format, stage, samplePoints, C, A, L } = t.params;
@@ -640,10 +637,7 @@ Parameters:
     const descriptor: GPUTextureDescriptor = {
       format,
       size,
-      usage:
-        GPUTextureUsage.COPY_DST |
-        GPUTextureUsage.TEXTURE_BINDING |
-        (canUseAsRenderTarget(format) ? GPUTextureUsage.RENDER_ATTACHMENT : 0),
+      usage: GPUTextureUsage.COPY_DST | GPUTextureUsage.TEXTURE_BINDING,
       mipLevelCount: maxMipLevelCount({ size }),
     };
     const { texels, texture } = await createTextureWithRandomDataAndGetTexels(t, descriptor);
diff --git a/src/webgpu/shader/execution/expression/call/builtin/texture_utils.spec.ts b/src/webgpu/shader/execution/expression/call/builtin/texture_utils.spec.ts
index 3923e7d3909..6f4bf2a59cb 100644
--- a/src/webgpu/shader/execution/expression/call/builtin/texture_utils.spec.ts
+++ b/src/webgpu/shader/execution/expression/call/builtin/texture_utils.spec.ts
@@ -90,11 +90,13 @@ g.test('readTextureToTexelViews')
       .unless(
         t =>
           t.sampleCount > 1 &&
-          (!isMultisampledTextureFormat(t.srcFormat) || t.viewDimension !== '2d')
+          (!isMultisampledTextureFormat(t.srcFormat, false) || t.viewDimension !== '2d')
       )
   )
   .beforeAllSubcases(t => {
     t.skipIfTextureViewDimensionNotSupported(t.params.viewDimension);
+    // recheck if multisampled is supported with compat mode flag
+    t.skipIfMultisampleNotSupportedForFormat(t.params.srcFormat);
   })
   .fn(async t => {
     const { srcFormat, texelViewFormat, viewDimension, sampleCount } = t.params;