diff --git a/integration-test/src/test/java/org/apache/iotdb/db/it/IoTDBLoadTsFileIT.java b/integration-test/src/test/java/org/apache/iotdb/db/it/IoTDBLoadTsFileIT.java
index fa5e0ecc31341..6640277eddbab 100644
--- a/integration-test/src/test/java/org/apache/iotdb/db/it/IoTDBLoadTsFileIT.java
+++ b/integration-test/src/test/java/org/apache/iotdb/db/it/IoTDBLoadTsFileIT.java
@@ -25,6 +25,8 @@
 import org.apache.iotdb.db.it.utils.TestUtils;
 import org.apache.iotdb.db.storageengine.dataregion.modification.ModificationFile;
 import org.apache.iotdb.db.storageengine.dataregion.modification.TreeDeletionEntry;
+import org.apache.iotdb.db.storageengine.dataregion.modification.v1.ModificationFileV1;
+import org.apache.iotdb.db.storageengine.dataregion.tsfile.TsFileResource;
 import org.apache.iotdb.it.env.EnvFactory;
 import org.apache.iotdb.it.env.cluster.node.DataNodeWrapper;
 import org.apache.iotdb.it.framework.IoTDBTestRunner;
@@ -1010,6 +1012,31 @@ public void testLoadWithEmptyTsFile() throws Exception {
     }
   }
 
+  @Test
+  public void testDeleteEmptyTsFileAfterLoad() throws Exception {
+    final File tsFile = new File(tmpDir, "empty-1-0-0-0.tsfile");
+    try (final TsFileGenerator ignored = new TsFileGenerator(tsFile)) {}
+
+    final File resourceFile = new File(tsFile.getAbsolutePath() + TsFileResource.RESOURCE_SUFFIX);
+    final File modsFile = ModificationFile.getExclusiveMods(tsFile);
+    final File modsV1File = new File(tsFile.getAbsolutePath() + ModificationFileV1.FILE_SUFFIX);
+
+    Assert.assertTrue(resourceFile.createNewFile());
+    Assert.assertTrue(modsFile.createNewFile());
+    Assert.assertTrue(modsV1File.createNewFile());
+
+    try (final Connection connection = EnvFactory.getEnv().getConnection();
+        final Statement statement = connection.createStatement()) {
+      statement.execute(
+          String.format("load \"%s\" with ('on-success'='delete')", tsFile.getAbsolutePath()));
+
+      Assert.assertFalse(tsFile.exists());
+      Assert.assertFalse(resourceFile.exists());
+      Assert.assertFalse(modsFile.exists());
+      Assert.assertFalse(modsV1File.exists());
+    }
+  }
+
   @Test
   public void testAsyncLoadKeepsSameNamedTsFilesWithModsIsolated() throws Exception {
     registerSchema();
diff --git a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/analyze/load/LoadTsFileAnalyzer.java b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/analyze/load/LoadTsFileAnalyzer.java
index e11fa2c977af4..8ceea29ceef0c 100644
--- a/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/analyze/load/LoadTsFileAnalyzer.java
+++ b/iotdb-core/datanode/src/main/java/org/apache/iotdb/db/queryengine/plan/analyze/load/LoadTsFileAnalyzer.java
@@ -26,6 +26,7 @@
 import org.apache.iotdb.commons.queryengine.common.SessionInfo;
 import org.apache.iotdb.commons.queryengine.common.SqlDialect;
 import org.apache.iotdb.commons.queryengine.utils.TimestampPrecisionUtils;
+import org.apache.iotdb.commons.utils.RetryUtils;
 import org.apache.iotdb.db.conf.IoTDBDescriptor;
 import org.apache.iotdb.db.exception.load.LoadAnalyzeException;
 import org.apache.iotdb.db.exception.load.LoadAnalyzeMissingSchemaException;
@@ -42,6 +43,7 @@
 import org.apache.iotdb.db.queryengine.plan.relational.metadata.Metadata;
 import org.apache.iotdb.db.queryengine.plan.relational.sql.ast.LoadTsFile;
 import org.apache.iotdb.db.queryengine.plan.statement.crud.LoadTsFileStatement;
+import org.apache.iotdb.db.storageengine.dataregion.modification.ModificationFile;
 import org.apache.iotdb.db.storageengine.dataregion.tsfile.TsFileResource;
 import org.apache.iotdb.db.storageengine.dataregion.tsfile.TsFileResourceStatus;
 import org.apache.iotdb.db.storageengine.dataregion.utils.TsFileResourceUtils;
@@ -68,6 +70,7 @@
 import java.io.FileNotFoundException;
 import java.io.IOException;
 import java.nio.BufferUnderflowException;
+import java.nio.file.Files;
 import java.util.ArrayList;
 import java.util.Arrays;
 import java.util.Collections;
@@ -489,7 +492,10 @@ && handleSingleMiniFile(i)) {
           DataNodeQueryMessages.EMPTY_FILE_DETECTED_WILL_SKIP_LOADING_THIS_FILE,
           tsFile.getAbsolutePath());
       if (isDeleteAfterLoad) {
-        org.apache.iotdb.commons.utils.FileUtils.deleteFileIfExist(tsFile);
+        deleteFile(tsFile);
+        deleteFile(new File(LoadUtil.getTsFileResourcePath(tsFile.getAbsolutePath())));
+        deleteFile(ModificationFile.getExclusiveMods(tsFile));
+        deleteFile(new File(LoadUtil.getTsFileModsV1Path(tsFile.getAbsolutePath())));
       }
     } finally {
       // reset the session info to the original one
@@ -497,6 +503,18 @@ && handleSingleMiniFile(i)) {
     }
   }
 
+  private void deleteFile(final File file) {
+    try {
+      RetryUtils.retryOnException(
+          () -> {
+            Files.deleteIfExists(file.toPath());
+            return null;
+          });
+    } catch (final Exception e) {
+      LOGGER.warn(DataNodeQueryMessages.DELETE_AFTER_LOADING_ERROR, file, e);
+    }
+  }
+
   private boolean handleSingleMiniFile(final int i) throws FileNotFoundException {
     final long startTime = System.nanoTime();
     try {